About: http://webisa.webdatacommons.org/227293180

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown in FIG. 3, each partition wall 70 has a substantially trapezoidal cross section, and the width W1 of an upper surface 70T, on which the power supply line 66A is disposed, is, e.g. 30 to 40 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com