About: http://webisa.webdatacommons.org/227326644

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	By collecting the data such as in the DKL 813, the present invention allows the defect engineers to have an overview of information traditionally accessible only by process engineers, regarding performance of the tools.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com