About: http://webisa.webdatacommons.org/227513093

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	At this time, in this embodiment, plasma processing is conducted using gas that contains hydrogen, such as H2 or NH3, before a film is formed, and heat treatment is conducted after the film is formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au