| http://www.w3.org/ns/prov#value | - It will be noted that the heat-processing or cooling-processing of the substrate 9 may be performed in the return carry lines 95L, 95R. More particularly, this refers to a configuration in which processing such as film formation is performed on the outward carry line 94 and which, in actual application, cooling-processing is performed on the return lines 95L, 95R.
|
