About: http://webisa.webdatacommons.org/22796806

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention relates to a substrate rotating apparatus for rotating a substrate to be processed, e.g. a semiconductor substrate, in a processing chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com