About: http://webisa.webdatacommons.org/227985802

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Also, the impurity such as phosphorous contained in the second silicon oxide layer may act as a getter of mobile ions, such as alkali-ions that have deteriorating effects on the device-reliability characteristics.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com