About: http://webisa.webdatacommons.org/22800934

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The choice of which structure (photomask or substrate) to position is a function of the particular mask aligner, and is not germane to operation of the invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au