About: http://webisa.webdatacommons.org/228177555

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the case of forming an interconnect structure, the insulating interlayer may include the known insulating material such as BPSG, PSG, BSG, AsSG, PbSG, SbSG, SOG, SiON or SiN, or the dielectric stack thereof, other than SiO2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com