About: http://webisa.webdatacommons.org/228183034

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this embodiment, a metal layer such as Ti, Pt, Co, W is sputtered on the source and drain 16, on the gate 8, and on the side-wall spacers 18.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com