About: http://webisa.webdatacommons.org/228219832

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	On the substrate electrodes for particle positioning means or ion transport detection structures (310) are provided, such as through sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk