About: http://webisa.webdatacommons.org/228249657

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the manufacture of semiconductor integrated circuits (IC), dielectric materials such as silicon dioxide (SiO2), silicon nitride (Si3N4), and silicon oxynitride (SiON) have been widely used as insulators for transistor gates.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr