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About:
http://webisa.webdatacommons.org/228576188
Property
Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value
the deposition method (sputtering or PECVD) and parameters such as power or working
http://www.w3.org/ns/prov#wasQuotedFrom
nanoscalereslett.com
