About: http://webisa.webdatacommons.org/228615164

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Otherwise, two layers i.e. a layer having a thermal expansion coefficient close to the thermal expansion coefficient of the target holder and a layer having a thermal
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com