About: http://webisa.webdatacommons.org/22882007

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The conductive material such as aluminum, tungsten, titanium nitride and polysilicon are used for forming the contact conductor 4 and the connecting lead layer 5.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com