About: http://webisa.webdatacommons.org/229200781

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 15, 16, 17, 18 and 19 are longitudinal sectional views of structures resulted from respective steps of the method of manufacturing the device including the IGBT with the built-in FWD illustrated in FIG. 2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com