About: http://webisa.webdatacommons.org/229682728

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	methyltrichlorosilane, or from silicon tetrachloride or other such silicon halides if present in the silicon halide feedstock).
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com