About: http://webisa.webdatacommons.org/229684724

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A more detailed description of the operation of ellipsometer 10 and the modeling of such semiconductor material, processes, and interfaces is described more particularly with regard to the flow chart of FIG. 2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr