About: http://webisa.webdatacommons.org/229794422

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This method includes providing 20 a deposition disc 11 (shown in phantom in FIG. 1) fabricated from a rigid, electrically conductive material such as steel or stainless steel.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com