About: http://webisa.webdatacommons.org/229823082

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The layer is heavily doped with an N-type dopant, such as phosphorus (P), by in situ doping.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com