| http://www.w3.org/ns/prov#value | - Thus, even when the openings 18 are provided on the terminal parts of the metal electrodes, it is desirable to stack the transparent conductive oxide film 14 b made of a material such as ITO onto the terminal parts (metal terminal parts 14 a) in order to prevent oxidization on the surfaces of the terminal parts (metal terminal parts 14 a).
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