About: http://webisa.webdatacommons.org/22992677

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The deposition resistant liners 300 and 310 may be made of a ceramic, such as aluminum oxide (Al2 O3), as shown in FIG. 3, or aluminum nitride (AlN), for example.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com