About: http://webisa.webdatacommons.org/229999962

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method according to claim 1, wherein said first conducting layer is a gate electrode. 5.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com