About: http://webisa.webdatacommons.org/230017496

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	These systems are used for the development and manufacturing of devices such as integrated circuits, flat panel displays hard disk drives and optical communication components.
http://www.w3.org/ns/prov#wasQuotedFrom	businesswire.com