About: http://webisa.webdatacommons.org/230033254

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The exposure apparatus is not particularly limited to one suited for manufacturing semiconductors, and any other type of exposure apparatus may also be employed, such as one s
http://www.w3.org/ns/prov#wasQuotedFrom	google.com