About: http://webisa.webdatacommons.org/230128631

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The high density plasma can be generated from a suitable gas or gas mixture such as oxygen and/or argon and an ion beam is extracted from the plasma chamber though orifice 3a.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com