About: http://webisa.webdatacommons.org/230451838

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The source/drain metal may be selected from molybdenum (Mo), a molybdenum alloy, titanium (Ti), tantalum (Ta), copper (Cu), an aluminum-system metal, or other suitable metals.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com