PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • This process may include employing photolithography or other methods and using an etching process portions of layers 204 and 205 are removed to expose the etch stop layer 203.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com