About: http://webisa.webdatacommons.org/230781937

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The resulting structure is a via (the filled via portion) connecting the desired areas in the underlying metal layer with an overlying copper line (the filled trench portion).
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com