About: http://webisa.webdatacommons.org/231570098

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	At the beginning of the etch the entire wafer surface is covered with organic material, i.e. PR and SiLK???.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com