About: http://webisa.webdatacommons.org/231769933

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A metal silicide including a metal that is different from the metal catalyst is present within a region of the semiconductor layer under the contact hole from the surface of the semiconductor layer to a predetermined depth.02-26-2009
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org