About: http://webisa.webdatacommons.org/231892337

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A method for manufacturing a liquid crystal display device according to claim 16, wherein the second layer includes an inorganic material such as a selected one of a silicon nitride and a silicon oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com