About: http://webisa.webdatacommons.org/232205393

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, in the case of using carbon (C), the damaged layer 15 is a region into which carbon is implanted at a dose of 1???1013 cm???2 to 1???1016 cm???2 and preferably 1???1014 cm???2 to 5???1015 cm???2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com