About: http://webisa.webdatacommons.org/232251670

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	CVD or another suitable method followed by RIE, CMP or another suitable method may be employed to fill such vias 802 with a conductor, such as tungsten or another suitable material, thereby forming studs 804.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com