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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	other deposition process. A SiO.sub.2 layer can also be grown on exposed surfaces of the substrate 10 using an oxidizing atmosphere such as steam and O.sub.2 at an elevated temperature (e.g., 950.degree. C.).
http://www.w3.org/ns/prov#wasQuotedFrom	docstoc.com