About: http://webisa.webdatacommons.org/232590435

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Aside from the sputtering method, other methods such as ion plating, chemical vapor deposition (MOCVD) using organic metals, and others are also employed as methods of forming the ITO film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com