About: http://webisa.webdatacommons.org/232670206

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A test such as this is useful to determine the influence of the etchant loading effect and any resultant increased or decreased oxide damage when gate structures are located close together.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com