About: http://webisa.webdatacommons.org/232672003

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Etching of the dielectric layers to form vertical interconnects is preferably performed with a mixture of gases including argon, CO, and one or more gases selected from CF4, C2F6, and C4F8.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com