About: http://webisa.webdatacommons.org/232676215

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 3A to 3D are diagrams showing examples of the structure of a buried pattern in the first embodiment;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com