About: http://webisa.webdatacommons.org/232931726

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The invention is more specifically directed to the formation of a buried isolation region using implantation of oxygen, nitrogen or other insulation-forming particles into a single crystal semiconductor substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr