About: http://webisa.webdatacommons.org/233186976

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention employs a novel approach to applying copper metallization to a workpiece, such as a semiconductor workpiece.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr