| http://www.w3.org/ns/prov#value | - While the illustrated example shows a construction in which the ribs 122 extend in the direction of the lamp 144, the present invention is not limited to such a specific construction, and other constructions such as the one in which the ribs 122 extend toward the wafer W or the one in which the ribs 122 are formed on both top and bottom surfaces of the plate 121, are possible.
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