About: http://webisa.webdatacommons.org/23324123

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate material of claim 1 , wherein the particles contain carbide, in particular silicon carbide, aluminium nitride, gallium nitride, titanium nitride. 8.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com