About: http://webisa.webdatacommons.org/233510206

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The apparatus of claim 1, wherein the substrate is included in a die, the die including an electronic device at the first surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com