| http://www.w3.org/ns/prov#value | - When the plasma 1094 is generated by introducing high-frequency waves such as microwaves, plasma which has the low electron temperature (less than or equal to 3 eV, preferably less than or equal to 1.5 eV) and the high electron density (greater than or equal to 1???1011 cm???3) can be generated.
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