About: http://webisa.webdatacommons.org/233630567

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thereby, the surface of the wafer 101 is spirally scanned, in the whole given area of which surface the detection and distinction or the classification of such defect as scratch or foreign particle is carried out.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com