About: http://webisa.webdatacommons.org/23373847

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Change will not be easy, especially for those suppliers that have built billion-dollar tool businesses based on the paradigm of depositing CVD films under vacuum.
http://www.w3.org/ns/prov#wasQuotedFrom	eetimes.com