About: http://webisa.webdatacommons.org/233857364

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The anchor region 114 is etched through the LTO down to the Si3N4 layer using a reactive ion etching process, or a wet etching process using buffered hydrofluoric acid (BHF), for example, or other similar process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com