About: http://webisa.webdatacommons.org/233861113

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present inventors considered that the impurities such as oxygen or nitrogen mixed from the surface of the semiconductor film are distributed in such a way that the impurity is inclined locally due to the flow.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com