About: http://webisa.webdatacommons.org/233872170

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The MEMS resonator 10 is formed above a substrate 1 such as a semiconductor substrate made of monocrystalline silicon or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com