| http://www.w3.org/ns/prov#value | - Compared to conventional thin film forming processes such as evaporation, or sputtering, sol-gel processing makes it possible to control the microstructure of the deposited film including the pore volume, pore size, and surface area [89] and uses mainly alkoxide, organic/ inorganic salts, metal oxides and other salts in a liquid phase chemical reaction.
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